GAERTNER ELLIPSOMETER PDF

Quality ellipsometers can detect film and surface conditions less than an. software and USB upgrades Older ellipsometer models interfaced to old computers can be upgraded to a USB. Ellipsometers give non-contact thickness and refractive index measurements of.

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Monolayer organic films are an excellent application for the precision and stability of the model LSE. The space-saving design features a small footprint yet it can accommodate large samples up to mm wide. The image can be rotated, tilted, reduced or enlarged for immediate viewing and interpretation.

The wafer is held on the optically flat table by vacuum.

The measurements are rapid and precise with no moving parts involved. Two, three and four layer films, with know bottom layers such as poly on oxide and oxide on poly on oxide can be measured for the thickness and refractive index of the top layer or for both thicknesses.

Gaertner Scientific LSE-WS – In Stock, We Buy Sell Repair, Price Quote

This permits fast, uninterrupted measurement over the entire wafer surface without the need to pause to correct for focus and tilt. The Windows software is flexible permitting any of the 14 substrate or film parameters to be solved for or fixed using computational routines developed by NIST. The stages move automatically in rapid yet precise steps under programmed computer control.

Advanced StokesMeter determines the complete measuring beam polarization using no moving parts and no modulators, only 4 stationary silicon detectors so measurements are stable and exact. The sample table includes a manual tilt and table height adjustment which is set using an alignment screen on the computer.

The 8″ sample table can accept up to mm wafers and has mm left to right cross travel and can be scale read to 1 mm. For a given arrangement of four detectors, A can either be computed or determined by calibration.

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Gaertner Scientific Corporation – Ellipsometers – Stokes WAFERSKAN Ellipsometer LS

Measures complete state of polarization useful for rough, scattering samples. The aqua color lines are lines of constant top layer film refractive index Nf1. Areas as small as 15 X 45 micron can be measured.

Monolayer organic films are an excellent application for the precision and stability of the model LSE. Calibration Standards for Ellipsometers. The user interacts with a single main program screen so the set up is easy to understand and the measurement can be quickly made. Advanced StokesMeter measurement head. Measurement by automatic ellipsometers was introduced with the advent gaertber the personal computer.

This relationship is mathematically stated as the fundamental equation of ellipsometry: Similar wafers are automatically scanned with a single mouse click. In addition, ellipsometric measurements are insensitive to intensity fluctuations of the source, temperature ellipsomete of electronic components, and macroscopic roughness which can be a serious problem in reflectometry but not in ellipsometry, for which absolute intensity measurements are not required. Keep in mind however that some samples are simply ellipsometeg rough and scatter too much light to be measured ellipsometrically.

Gaertner L117 Ellipsometer

When measuring similar wafers, tilt-free, focus-free operation is the obvious benefit. S series Ellipsometers comply with European safety directives and ellipaometer the CE mark. In addition, the L-SCAT scatter option includes a hardware modification to capture more of the scattered light from rough, textured surfaces and a program display of the degree of polarization P.

Ellipsometers give non-contact thickness and refractive index measurements of thin transparent and semi transparent films dllipsometer sub-angstrom precision. Typical lifetime is greater than 3 years. The aqua color lines are lines of constant film refractive index Nf1.

LGEMP Windows software is versatile and can measure single layer films such as oxides, nitrides and photoresists as well the top layer on a known 1, 2, or 3 layer stack such as poly on oxide and oxide on poly on oxide. For a given arrangement of four detectors, A can either be computed or determined by calibration. These readings are then converted into film thickness and film refractive index by using tables, graphs, or personal computers.

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Polarizer and analyzer modules mount onto window flanges outside your CVD, electron-beam, MBE, sputtering reactor or chamber.

Gaertner Scientific LSE-WS Stokes WaferSkan Ellipsometer

Single layer films such as oxides, nitrides and photoresists can be measured to sub-angstrom precision. The easy to use model LS maps wafers up to mm in diameter and offers precise measurements at a cost much lower then conventional production control metrology systems. Transparent films from under one angstrom up to several microns and absorbing films less than angstroms thick can be measured ellipsometrically.

All Solid State with no moving parts. Microspot Optics are factory installed and non-removeable. Angles are easily selectable with no need for alignment prisms or sample readjustment. Results stored in a text data file are displayed in a 2D contour or 3D Image Map. The film can be transparent or absorbing in a medium of transparent solid, liquid, gas or vacuum. M ost users will not require ellipsometer recalibration. Fastest possible instrument for thin film measurement.

HeNe Angstrom Laser gives less than 1 mW output on sample. These instruments are factory refurbished and sold with a full 1 year warranty.

At 50 degrees incidence gaertnre measured area is 15 X 35 microns. Used to change the azimute of the linear polarization for certain in-line transmission measurements of transparent materials. The white lines are regions of Autofix of Nf1 since the index cannot be easily resolved in this region. Pedestal 8 inch table with provision for vacuum is freely positioned by hand.

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